Journal: Advanced Science

Article Title: A Review of Recent Advancements in Sensor‐Integrated Medical Tools

doi: 10.1002/advs.202307427

Figure Lengend Snippet: Sensor‐integrated catheters for vascular pressure monitoring and cardiac activity/contact mapping. a) Vascular pressure monitoring: i) MEMS fabricated sensor‐integrated piezoresistive pressure sensor mounted into the dual lumen neonatal catheter [ ⁶⁸ ] (Reproduced with permission. [ ⁶⁸ ] Copyright 2004, IEEE), ii) a flexible and biocompatible piezoelectric force sensor made of PVDF‐TrFE film mounted on the catheter [ ⁶⁹ ] (left figure) (Reproduced with permission. [ ⁶⁹ ] Copyright 2012, IEEE); and piezoelectric sensor with BaTiO 3 filler in the PDMS matrix integrated into the catheter [ ⁹² ] (right figure)(Reproduced with permission., [ ⁹² ] Copyright 2021, Wiley), iii) polymer substrate‐based MEMS pressure piezoresistive sensors on catheter tip [ ⁷⁰ ] (Reproduced under the terms of the CC‐BY‐2.0 license., [ ⁷⁰ ] Copyright 2012, Springer Nature), iv) real‐time arterial pulse monitoring with near‐field communication (NFC) from sensor‐integrated catheter [ ⁷¹ ] (Reproduced with permission. [ ⁷¹ ] Copyright 2022, American Chemical Society). b) Cardiac activity/contact mapping: i) illustration representing the electro‐anatomic mapping using CARTO (Biosense Webster, United States) (top figure) and generated 3D cardiac chamber anatomic structure (bottom figure) in combination with electrophysiology mapping catheter (NaviSTAR, Biosense Webster, United States) [ ⁷² ] (Reproduced under the terms of Creative Commons Attribution License. [ ⁷² ] Copyright 2008, Elsevier), ii) electrophysiology mapping with basket‐shaped catheter (left figure) and pulmonary vein potentials captured from leads on basket‐shaped catheter (right figure) [ ¹⁰⁴ ] (Reproduced with permission. [ ¹⁰⁴ ] Copyright 2015, Heart Rhythm Society and Elsevier), iii) soft robotic sensor arrays for conformal contact, an actuatable multilayered sensor for atrial mapping performing electrophysiology mapping with actuation [ ⁷⁴ ] (Reproduced under the terms of CC BY‐NC license., [ ⁷⁴ ] Copyright 2008, AAAS).

Article Snippet: Until now, MEMS pressure sensors and technologies for miniaturized packaging have led to successful commercialization from several companies (e.g., Amphenol, TEconnectivity, Millar) and utilization in clinical fields, which are used for minimally invasive and interventional pressure measurement.

Techniques: Activity Assay, Polymer, Generated

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Classification of MEMS acoustic sensors based on different working principles.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Piezoelectric MEMS acoustic sensors. ( a ) Basic working principle and typical multilayer structure of piezoelectric MEMS acoustic sensors. ( b ) A ZnO MEMS acoustic sensor with air cavity . ( c ) Multilayer cantilever design of a piezoelectric MEMS microphone, with AlN as piezoelectric material and MO as an electrode material .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Piezoelectric MEMS acoustic sensor based on ZnO film. ( a ) ZnO based structure for development of MEMS acoustic sensor . ( b – d ) The cavity structure with microtunnel design, which relates to the atmosphere, as a replacement of the traditional acoustic holes. ( b ) The fabricated cavity and metal electrode structure of ZnO MEMS acoustic sensor . ( c ) A ZnO MEMS acoustic sensor for aeroacoustic measurements . ( d ) A MEMS acoustic sensor with microtunnel for high SPL measurement, and with less risk of microtunnel blockages .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Piezoelectric MEMS acoustic sensor based on AlN. ( a ) A AlN pMUT based on the compatibility characteristics between AlN and CMOS processes . ( b ) AlN MEMS acoustic sensor aiming for ultra low working frequency . ( c ) AlN MEMS acoustic sensor with ultra-thin silicon substrate, and different structures for low and high working frequency . ( d ) AlN MEMS acoustic sensor with enhanced SNR (67.03 dB at 1 kHz) . ( e ) AlN MEMS hydrophone with high sensitivity (−178 dB, re. 1 V/μPa) and low noise density (52.6 dB@100 Hz, re. μPa/√Hz) . ( f ) AlN MEMS wideband (10 Hz to more than 10 kHz) acoustic sensor coated by organic film (elastic polyurethane) .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Performance comparison of several recent MEMS acoustic sensors based on different piezoelectric materials.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: Comparison

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Wearable acoustic sensor based on piezoelectric method. ( a ) Air-silicone composite device for physiological sounds detection [ , ]. ( b ) MEMS bionic hydrophone for heart sound sensing .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Piezoresistive MEMS acoustic sensor. ( a ) Low-frequency-detectable acoustic sensor using a piezoresistive cantilever . ( b ) Frequency-specific highly sensitive acoustic sensor using a piezoresistive cantilever and parallel Helmholtz resonators .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Representative structure and working principle diagram of capacitive MEMS acoustic sensors.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Capacitive MEMS Microphone. ( a ) Low-power digital capacitive MEMS microphone based on a triple-sampling delta-sigma ADC with embedded gain . ( b ) Wearable capacitive MEMS microphone for cardiac monitoring at the wrist . ( c ) Capacitive MEMS stethoscope with anti-stiction-dimple array design in the diaphragm and the backplate for highly reliable heart or lung sounds detection .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: Sampling

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Capacitive MEMS microphone with biomimetic design. ( a ) Dual-band MEMS directional acoustic sensor for near-resonance operation . ( b ) Directional-resonant MEMS acoustic sensor and associated acoustic vector sensor . Both ( a , b ) are inspired by the tympana configuration of the parasitic fly Ormia ochracea . The circled numbers in ( b ) are used to distinguish different structures.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: Plasmid Preparation

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Performance comparison of several recent capacitive MEMS acoustic sensors with different features.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: Comparison, Spectroscopy

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: MEMS acoustic sensor based on optical grating interferometer. ( a ) A grating interferometer design by a diffraction grating integrated backplate and a pressure-sensitive diaphragm . ( b ) Design of a MEMS optical microphone transducer based on light phase modulation . ( c ) Grating interferometer design with short-cavity structure and grating-on-convex-platform structure [ , ].

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: MEMS acoustic sensor based on Fabry–Perot method. ( a ) A typical structure of Fabry–Perot MEMS acoustic sensors. ( b ) An acoustic sensor based on active fiber Fabry–Pérot microcavities . ( c ) An application in the detection and position of partial discharge .

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques:

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Performance comparison of recent optical MEMS acoustic sensors based on different methods.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: Comparison

Journal: Micromachines

Article Title: MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

doi: 10.3390/mi16010043

Figure Lengend Snippet: Applications of MEMS acoustic sensors in biomedical field.

Article Snippet: Additionally, capacitive MEMS acoustic sensors have been integrated into wearable health monitoring systems and have inspired biomimetic device structures that emulate animal eardrums.

Techniques: